Discrete action micro-actuator optimization
Nikolaeva, A, McMillan, A.J. and Gavriushin, S (2015) Discrete action micro-actuator optimization. In: Advanced Materials for Demanding Applications, 7-9 April 2014, Glyndwr University, St Asaph, UK.
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Abstract
Micro-electro-mechanical systems (MEMS) devices are widely used in industry. The micro-actuator is an important component of such devices, transforming external influence into mechanical displacement. The development of a design technique to derive the optimal design parameters for a micro-actuator is a problem of current interest. The present paper describes a technique for determining geometric parameters for a simplified micro-actuator structure (a hemispherical shell), such that under a prescribed critical pressure it will undergo a specified discrete deflection. Such a deflection is commonly referred to as "snap-through". A mathematical model and a Finite Element procedure for the mechanical analysis of a flexible thin-walled shell under large deformation are proposed. Initially the snap-through is modelled as a quasi-static effect, but subsequently, the influence of the inertia is also considered. The optimization procedure was performed using the PSE/MACROS optimization program. The results for an example model numerical optimization are shown.
| Item Type: | Conference or Workshop Item (Paper) |
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| Additional Information: | doi: 10.1088/1757-899X/74/1/012011 |
| Keywords: | Computational physics, Electronics and devices, Instrumentation and measurement, Nanoscale science and low-D systems |
| Divisions: | Applied Science, Computing and Engineering |
| Depositing User: | Mr Stewart Milne |
| Date Deposited: | 15 May 2015 15:24 |
| Last Modified: | 26 Apr 2018 15:05 |
| URI: | https://wrexham.repository.guildhe.ac.uk/id/eprint/8302 |
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